Specification:
Ion optics Sysytem:
• Resolution of Ion image: 7nm@30kV
• ion beam current density: 1PA-30nA
• ion accelerate Voltage : 5-30kV
• Magnification: 300-500k
Electron Optics System:
• Resolution: 1.1nm@15kV
• Beam current density: 1PA-30nA
• Accelerate voltage: 0.2-30kV
• Magnification: 35-900k
Application:
• Micromachining, electron and ion imaging.
• Pt and SiO2 deposition, enhance etching of metal and insulator.
• Measuring element distribution.
• picking up or moving the nano-scale specimens using the nano-manipulator.
• Measuring the electricity of the device ,measuring the force with the micro-force tip(1µN-3mN ).
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